Credit points: 15

Subject outline

In EMS5NME, you will learn principles of advanced nano and micro-scale manufacturing engineering and how to apply the most relevant processes in use today to create novel microstructures, devices, and systems. You will learn both top-down and bottoms-up manufacturing processes, and how to integrate them together. You will learn top-down methods such as advanced photolithography, bulk/surface micromachining, 3-beam processing, precision electromechanical machining processes, and roll-to-roll processing. Important properties of key classes of materials will be discussed, including their electrical, magnetic, and optical characteristics. The modern synthesis of nano-scale building blocks into nanocomposites and bio-inspired nanomaterials. The self-assembly of molecules and nano-scale building blocks into nanocomposites and meso-scale structures and devices will also be discussed. Finally, concepts in micro-scale mechanical assembly, micro-robotics, and mirco-factories will be introduced. You will systematically explore the advantages and limitations of advanced nano and micro fabrication processes and learn how (and in what order) to apply them. You will gain an appreciation for the needs of the semiconductor, sensors, electronics packaging, NEMS/MEMS - microfluidics, and micro optics industries. Finally, you will consider requirements for nano/micromanufacturing enterprises with a particular emphasis on cost, performance, reliability, ease of manufacture, sustainability, and safety.

SchoolEngineering and Mathematical Sciences

Credit points15

Subject Co-ordinatorJames Maxwell

Available to Study Abroad/Exchange StudentsYes

Subject year levelYear Level 5 - Masters

Available as ElectiveYes

Learning ActivitiesInclude: twice-weekly lectures, 2-hr weekly workshops, textbook readings, one literature search activity, one recorded student presentation activity, one group project, and subject summary sheets.

Capstone subjectNo

Subject particulars

Subject rules

Prerequisites Students must be admitted in one of the following courses: SMENC, SMENCB, SMENE, SMENEB, SMENM, SMENMB or TM001.


Incompatible subjectsN/A

Equivalent subjectsN/A

Quota Management StrategyN/A

Quota-conditions or rulesN/A

Special conditionsN/A

Minimum credit point requirementN/A

Assumed knowledgeN/A

Learning resources

Micro and Nanomanufacturing, Volume I

Resource TypeBook

Resource RequirementRecommended

AuthorM. J. Jackson



PublisherCRC Press


Chapter/article titleN/A



Other descriptionN/A

Source locationN/A

Micro and Nano Fabrication: Tools and Processes

Resource TypeBook

Resource RequirementRecommended

AuthorH. H. Gatzen





Chapter/article titleN/A



Other descriptionN/A

Source locationN/A

Fundamentals of Microfabrication and Nanotechnology

Resource TypeBook

Resource RequirementRecommended

AuthorM. J. Madou


Edition/VolumeVol. 2

PublisherCRC Press


Chapter/article titleN/A



Other descriptionN/A

Source locationN/A

Career Ready


Work-based learningNo

Self sourced or Uni sourcedN/A

Entire subject or partial subjectN/A

Total hours/days requiredN/A

Location of WBL activity (region)N/A

WBL addtional requirementsN/A

Graduate capabilities & intended learning outcomes

Graduate Capabilities

Intended Learning Outcomes

01. Differentiate between top-down and bottoms-up manufacturing methods, and understand their relative advantages/disadvantages.
02. Design functional nano/micro-scale systems, while applying new knowledge of scaling principles, emergent material properties, and manufacturing methods.
03. Develop practical process sequences for manufacturing nano/micro-scale structures, devices, and systems, while demonstrating an appreciation for safety, sustainability, and the environment.
04. Analyse archival publications, and evaluate the originality of research contributions within the field of manufacturing engineering.
05. Demonstrate teamworking skills to effectively solve complex nano/micro-scale manufacturing problems.
06. Create professional reports and presentations to communicate original work effectively.

Subject options

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Start date between: and    Key dates

Melbourne (Bundoora), 2021, Semester 1, Blended


Online enrolmentYes

Maximum enrolment sizeN/A

Subject Instance Co-ordinatorJames Maxwell

Class requirements

LectureWeek: 10 - 22
Two 1.00 hour lecture per week on weekdays during the day from week 10 to week 22 and delivered via blended.

WorkShopWeek: 12 - 22
One 2.00 hours workshop per week on weekdays during the day from week 12 to week 22 and delivered via blended.


Assessment elementCommentsCategoryContributionHurdle% ILO*

Literature Search and Individual Report:

Subject chosen from a provided list of advanced materials topics, and students carry out a literature search on this topic and provide a written report with 5-Slides and 5 articles.

(600 words equivalent)

N/AReportIndividualNo10 SILO6

Two Recorded Student Lectures on Advanced Concepts:

Subject chosen from a list of advanced materials topics--related to (but beyond) the lecture notes; students pretend to instruct another student on this topic.  Video uploaded onto LMS. (15% Ea.)

(2000 words equivalent)

N/AOral presentationIndividualNo30 SILO1, SILO4, SILO6


Three 40-minute open-notes quizzes. 5% each quiz.  Must also turn-in hand-written summary sheets each time for credit (5% each quiz.)

(2000 word equivalent)

N/AQuizzesIndividualNo30 SILO1, SILO2, SILO3

One Final Examination:

Oral defence of group nanomanufacturing case study.  Videos, charts, and responses uploaded into LMS.

(2000 word equivalent per student)

N/APractical demonstrationCombinedYes30 SILO1, SILO2, SILO3, SILO5, SILO6