Multifunctional MEMS sensors

Multi sensitivity redundant node

This project involves the design and implementation of an array of identical multifunction sensors, which is named a Multi Sensitivity Redundant Node (MSRN), for the control system of Unmanned Aerial Vehicles.

Each MSRN consists of several micro-electro-mechanical structures on a single substrate, that are sensitive to acceleration, angular velocity, temperature, pressure, IR intensity, magnetic flux by implication electric current and fluid flow. It also incorporates the mechanisms for deriving estimates, with an indication of their quality, of the required parameters. This quality indication may be used as a basis for robust estimate amalgamation.